Description
The AMAT 0100-71224 is a high-performance, plasma-enhanced chemical vapor deposition (PECVD) system designed for the deposition of thin films in semiconductor fabrication. This system is built with advanced technology and features to enable high-quality films with superior uniformity and film thickness control.
Product Parameters:
- Wafer Size: Up to 300mm
- Deposition Rate: Up to 1000 Angstroms/min
- Gas Delivery System: MFC-controlled
- RF Power: Up to 5000 W
- Vacuum Chamber: Stainless steel
- Temperature Range: Room temperature to 400 degrees Celsius
- Process Gas: SiH4, NH3, N2O, O2, and others
Specifications:
- Process Uniformity: ±2% on 200mm wafers
- Film Thickness Range: 50nm to 2um
- Film Thickness Uniformity: ±3%
- Particle Level: 0.1 μm or less
- Chamber Base Pressure: < 1 × 10^-8 Torr
- Process Pressure: 10 Torr to 500 Torr
- Gas Inlet: Up to 4 with MFC control
- Exhaust: Turbo-molecular pump
Application:
The AMAT 0100-71224 PECVD system is suitable for a wide range of thin film deposition applications, such as:
- SiO2 and SiN films for passivation and insulation layers
- Low-k dielectric films for interconnects
- Anti-reflective coatings for photolithography
- SiGe and SiC films for advanced devices
- Other semiconductor thin film applications
Overall, the AMAT 0100-71224 offers advanced technology and features to enable high-quality, high-performance thin film deposition for semiconductor fabrication applications.
Brand: AMAT
P/N.: 0100-71224
Origin: USA
MOQ: 1
Guarantee Period: One year
Lead Time: 3-5 days after payment
Delivery: EMS, FedEx, Deppon
Condition: In Stock, Brand New
Payment Method: T/T, Paypal, Western Union
Price: Please contact us for further inquiry. All quotes are basic on EXW excluding tax.
Remark: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description.
Application industry:
1.Power industry, the elevator industry, parking, automobile, auto ancillary.
2.Feed industry, aluminum smelting machines, refrigeration industry.
3.Steel industry, combustion control systems, non-ferrous metal smelting.
4.Glass industry, construction machinery, textile machinery, water treatment.
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Stock status: In stock
Product quality: Brand new, one year warranty, good price Acceptance standard: Acceptance according to the original manufacturer’s standard
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D. Timely supply, under normal circumstances, the goods will arrive within 6 working days, and under special circumstances, it will be negotiated according to the needs of customers.
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The company has strong strength, complete equipment, perfect detection means, reliable quality and superior performance. Since our company adheres to the tenet of all for the sake of users, adheres to strict delivery deadlines, reasonable price standards, excellent product quality, and proper after-sales service, we have long-term sincere and effective cooperation with new and old customers, reflecting a reliable reputation. The performance and unique advantages are trusted and welcomed by the majority of users.
Shenzhen Changxin Automation equipment Co., Ltd
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Promise 1: Guarantee brand new imported products.
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Advantageous prices and large quantity of in-stock products.
Process 1: 1. The customer confirms the required product model for purchase.
Process 2: 2. We will prepare a detailed formal quotation based on the model and delivery time requested.
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