LAM  839-101612-885 

The LAM 839-101612-885 is an electrostatic chuck (ESC) used in plasma etching and sputtering applications for semiconductor wafer processing. It is designed to hold and secure semiconductor wafers during the etching or sputtering process, ensuring uniform processing and high-quality results.

Key Features:

  • Electrostatic Clamping: Utilizes electrostatic forces to firmly clamp the wafer onto the chuck, providing precise wafer positioning and minimizing wafer damage.

  • High Thermal Conductivity: Features high thermal conductivity to efficiently dissipate heat generated during the etching or sputtering process, preventing wafer thermal stress and ensuring process stability.

  • Uniform Plasma Distribution: Enables uniform distribution of plasma across the wafer surface, resulting in consistent etching or sputtering rates and uniform wafer characteristics.

  • Corrosion Resistance: Constructed with corrosion-resistant materials to withstand harsh plasma and chemical environments, ensuring long service life and reliable performance.

  • Compatible with Various Wafer Sizes: Supports a range of wafer sizes, allowing for flexibility in processing different wafer types.

Category:

Description

The LAM 839-101612-885 is an electrostatic chuck (ESC) used in plasma etching and sputtering applications for semiconductor wafer processing. It is designed to hold and secure semiconductor wafers during the etching or sputtering process, ensuring uniform processing and high-quality results.

Key Features:

  • Electrostatic Clamping: Utilizes electrostatic forces to firmly clamp the wafer onto the chuck, providing precise wafer positioning and minimizing wafer damage.

  • High Thermal Conductivity: Features high thermal conductivity to efficiently dissipate heat generated during the etching or sputtering process, preventing wafer thermal stress and ensuring process stability.

  • Uniform Plasma Distribution: Enables uniform distribution of plasma across the wafer surface, resulting in consistent etching or sputtering rates and uniform wafer characteristics.

  • Corrosion Resistance: Constructed with corrosion-resistant materials to withstand harsh plasma and chemical environments, ensuring long service life and reliable performance.

  • Compatible with Various Wafer Sizes: Supports a range of wafer sizes, allowing for flexibility in processing different wafer types.

Applications:

The LAM 839-101612-885 ESC is widely used in various semiconductor wafer processing applications, including:

  • Pattern Transfer: Etching patterns into the wafer surface for device fabrication.

  • Material Deposition: Sputtering thin films of materials onto the wafer surface for device fabrication.

  • Surface Modification: Modifying the wafer surface properties for device optimization.

  • Wafer Cleaning: Removing contaminants from the wafer surface to improve device performance.

  • Wafer Thinning: Thinning the wafer to reduce its thickness and improve device performance.

Considerations:

  • Etching/Sputtering Process Requirements: Ensure the ESC’s compatibility with the specific etching or sputtering process parameters, such as temperature, pressure, and plasma chemistry.

  • Wafer Size and Material: Verify that the ESC can support the intended wafer size and material.

  • Integration with Etching/Sputtering Equipment: Ensure proper integration with the etching or sputtering equipment to achieve optimal process performance.

  • Maintenance and Cleaning: Follow proper maintenance and cleaning procedures to maintain the ESC’s performance and extend its lifespan.


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Stock status: In stock
Product quality: Brand new, one year warranty, good price Acceptance standard: Acceptance according to the original manufacturer’s standard
Spare parts: The quantity and supply method of spare parts and tools are in accordance with the original manufacturer’s standard
Our store currently has more than 10,000 pieces of inventory, sufficient stock, competitive price, recommended after-sales service.
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And other major brands of DCS, PLC, robot, large servo four major system spare parts. (Imported original genuine products, professional discontinued accessories)
Sincerely hope to establish a long-term and stable business relationship with various units, and actively supply various specifications and models of instrumentation products, and contribute to the development of business units with high-quality and low-cost products and high-quality after-sales service.
A. Dedicated to provide customers with products of stable quality and satisfactory after-sales service, under the premise of ensuring product quality, supply as low as possible and reasonably.
B. The production is organized according to the national standard or industry standard, and the product quality is guaranteed to meet the requirements. Under the condition of correct use, the service life is not lower than other similar products.
C. Assist customers to choose product types, specifications and models scientifically and reasonably.
D. Timely supply, under normal circumstances, the goods will arrive within 6 working days, and under special circumstances, it will be negotiated according to the needs of customers.
E. Since the goods are produced by foreign original manufacturers, the manufacturers provide after-sales service. The shelf life generally ranges from half a year to one year. The specific shelf life is based on what the original factory provides. Once there is a problem with the product quality, if it is identified as a manufacturer's quality problem by both parties, we will send it back to the original manufacturer for repair or other processing.
The company has strong strength, complete equipment, perfect detection means, reliable quality and superior performance. Since our company adheres to the tenet of all for the sake of users, adheres to strict delivery deadlines, reasonable price standards, excellent product quality, and proper after-sales service, we have long-term sincere and effective cooperation with new and old customers, reflecting a reliable reputation. The performance and unique advantages are trusted and welcomed by the majority of users.

Shenzhen Changxin Automation equipment Co., Ltd
Product Promise:
Promise 1: Guarantee brand new imported products.
Promise 2: Guarantee safe and timely delivery.
Promise 3: Guarantee quality after-sales service.
Advantageous prices and large quantity of in-stock products.

Process 1: 1. The customer confirms the required product model for purchase.
Process 2: 2. We will prepare a detailed formal quotation based on the model and delivery time requested.
Process 3: 3. The customer receives the quotation and places an order after confirming the model is correct.
Process 4: 4. The person in charge prepares a sales contract based on the model and quantity provided by the customer.
Process 5: 5. After receiving the contract, the customer reviews and agrees, signs and stamps it, and then remits the contract amount to the designated bank account.
Process 6: 6. After our finance department receives the payment, the salesperson arranges the shipment and notifies the customer of the tracking number.


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